OEM Group System Upgrades

OEM Group offers a full range of product upgrades in each product group designed to increase system productivity, extend process capability, and lower operating costs. Upgrading with OEM Group maximizes return on investment on equipment and extends the system's productive life and capabilities to meet current and future production needs.

AGHeatpulse
AMAT Centura
AMAT Endura
AMAT P5000
Mattson Aspen II
MRC Eclipse
Novellus C1 & C2

RTP

CVD, Etch,
RTP, Epi, PVD


PVD

CVD, Etch

Ash, CVD

PVD

DCVD, WCVD

Upgrades include:
• ez-DTC
• in-Situ Oxygen Monitor
• N2 Curtain

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Upgrades include:
• CVD Heater ReNEW

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Upgrades include:
• PVD Heater ReNEW

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Upgrades include:
• P5000 Robot

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• Mark IV Controller Upgrade
• Star & Mark II Controller Upgrade

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• Robot ReNEW
• C1 & C2 Heater Block
• RF Endpoint

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