Tegal

Tegal

Tegal Thin-Film Etch Introduction

OEM Group is the exclusive manufacturer of the Tegal 900 and 6500-Series Thin Film Etch platforms. Utilizing state-of-the-art manufacturing facilities, OEM Group offers both new and refurbished systems, retrofits, upgrades, OEM-direct spare parts, and field service.

Tegal Models

Tegal 901 & 903 ACS
Thin-Film Etch

Tegal 901

Tegal 981 ACS
Thin-Film Etch

Tegal 980

Tegal 6500 HRe-
Thin-Film Etch

Tegal 6500