Tegal Thin-Film Etch and PVD
OEM Group is the exclusive manufacturer of the Tegal 900 and 6500-Series Thin Film Etch, as well as the Endeavor and AMS PVD Platforms. Utilizing state-of-the-art manufacturing facilities, OEM Group offers both new and refurbished systems, retrofits, upgrades, OEM-direct spare parts, and field service.
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Thin-Film Etch:
• 901ACS™
• 903ACS™
• 981ACS™
• 6500 HRe—™ Series
PVD:
• Endeavor AT™
• EndeavorEUV™
• AMS SMT™
