Spin Rinse Dryer

 

OEM Group’s Spin Rinse Dryer (SRD) was acquired from Applied Materials Semitool
in May 2011. SRD is the world standard for high-performance cleaning, rinsing and drying.
The original Spin Rinse Dryer concept was simple. A single cassette of wafers is placed
in a stainless steel rotor. The wafers are centered just off the axis of rotation, and
rotated at high rpms so that centrifugal force “locks” the wafers in place to prevent
tumbling and subsequent particle generation.

Applications:

• Residual chemical removal

Features and Specifications:

• PSC-108 LCD touch screen, programmable controller, featuring operations,
  process and maintenance modes
• N2 heater alarm alerts user if there is a failure with N2 heater at any point
  during the process
• Operations status light, located on the front of the tool, alerts user of different
  states of tool status.
• Programmable preventative maintenance alerts
• User programmable auto cycle (AC-10)
• DI water resistivity monitoring (RM-20) enables rinsing to a certain resistivity
  before tool continues to next recipe step
• DI water recirculation (WR-20) ensures no particles are created in DI lines
• Mechanical Door Lock (DL-20) ensures rotor comes to a complete stop, and
  door seal is fully deflated before operator can open the chamber door
• Anti-Stat (CY-20) removes static charge from inside the process chamber
• Emergency Machine Off (EMO) buttons

Benefits

• Uniform DI water distribution over wafers using nine-nozzle manifold
  
• One button operation
  
• Over 95% up time
  
• Low cost of ownership (use of DI and N2 utilities only)
  
• Controller system built using off-the-shelf components
  
• Proven BKM recipe pre-loaded onto controller
  
• Optimized for low particles
  
• Electro-polished chamber, rotor, and manifolds
  
• EGF bowl seal