Semitool Spin Rinse Dryer

Semitool

Semitool Spin Rinse Dryer

OEM Group’s Spin Rinse Dryer (SRD) was acquired from Applied Materials Semitool in May 2011. SRD is the world standard for high-performance cleaning, rinsing and drying. The original Spin Rinse Dryer concept was simple. A single cassette of wafers is placed in a stainless steel rotor. The wafers are centered just off the axis of rotation, and rotated at high rpms so that centrifugal force “locks” the wafers in place to prevent tumbling and subsequent particle generation.

Applications:

  • Residual Chemical Removal

Features & Specifications:

  • PSC-108 LCD touch screen, programmable controller, featuring operations, process and maintenance modes
  • N2 heater alarm alerts user if there is a failure with N2 heater at any point during the process
  • Operations status light, located on the front of the tool, alerts user of different states of tool status.
  • Programmable preventative maintenance alerts
  • User programmable auto cycle (AC-10)
  • DI water resistivity monitoring (RM-20) enables rinsing to a certain resistivity before tool continues to next recipe step
  • DI water recirculation (WR-20) ensures no particles are created in DI lines
  • Mechanical Door Lock (DL-20) ensures rotor comes to a complete stop, and door seal is fully deflated before operator can open the chamber door
  • Anti-Stat (CY-20) removes static charge from inside the process chamber
  • Emergency Machine Off (EMO) buttons

Benefits:

  • Minimize fab floor space
  • Over 95% up time
  • <20 adders @ 0.2μm per wafer
  • Low cost of ownership (use of DI and N2 utilities only)
  • Controller system built using off-the-shelf components
  • High throughout (25 wafer lots)
  • Electro-polished chamber, rotor, and manifolds
  • Proven BKM recipe pre-loaded onto controller

SRD Boats

Semitool SRD