Semitool Equinox CPT

Semitool

Semitool Equinox Introduction

This single substrate processing system offers diverse capabilities with a variety of process chambers integrated into a single tool. The Equinox is an application-specific tool with a centralized, automated process controller. It is available in either a manual or fully automated platform.

Applications:

  • Discretes
  • MEMS
  • Optoelectronics
  • Packaging
  • Communications

Processes:

Solvent/Acid/Base Applications

Typical Plating Applications

  • Polymer removal Metal lift-off
  • Photoresist strip
  • Metal etch
  • Backside film strip
  • Acid and solvent cleans
  • Native oxide pre-clean
  • Pre-EPI clean
  • HF vapor
  • Sacrificial oxide etch
  • Bevel etch
  • Particle cleans
  • Gold electroplating and deplating
  • Solder bump plating
  • Copper damascene electroplating
  • Patterned copper electroplating
  • Nickel electroplating
  • Platinum electroplating
  • Electrophoretic resist

Modules:

  • Spray Processing
  • High Pressure Spray Chamber
  • Vapor
  • Immersion
  • Megasonics
  • Electroplating
  • Active Immersion Chamber

Features:

  • 1 – 6 Chambers Automated or Manual, Max 5 tanks
  • Supports substrates up to 200mm round, square or rectangle
  • Processes diverse materials
  • Face down processing
  • Partial wafer processing
  • Controlled chemical distribution and wafer rotation
  • Precise, repeatable, and reliable process and system control

Benefits:

  • Sequential and/or independent processing
  • Eliminates re-deposition/damage
  • Acid and solvent on one platform
  • Space efficient design

Semitool Equinox