The Novellus Concept One and Mattson Aspen II Robot ReNEW Program features a complete assembly overhaul back to original equipment manufacturer specifications, plus rigorous testing utilizing a dedicated test platform. Our program provides a reduced cost alternative to traditional full unit replacement, and our rapid turnaround minimizes downtime, reduces inventory carrying costs, and provides lower overall cost of ownership.
Between now and the end of 2009, OEM Group is offering a special where if you order 4 Novellus Concept One or Mattson Aspen II Robot ReNEWs from OEM Group and receive a 5th Robot ReNEW at no cost!
Call us for more details at 480-558-9200, opt 3
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Available Services:
• ReNEW
• Exchange
• New
Typical Performance Failure Modes:
• Rotation errors
• Extension time out errors
• Dropped or misplaced wafers
• Excessive noise
• High mechanical particle counts
• X, Y, Z Axis Backlash
ReNEWing Procedures:
• Robot ReNEWing is performed at OEM Group facility by trained staff using documented procedures. ReNEWing steps include:
• Receipt and Inspection
• Teardown/Disassembly
• Assembly
• Test and Quality Assurance
Features & Benefits:
New consumables and replaced components
• Extended life
• Improved product performance
Customizable service programs
• Offers customers the flexibility to choose which program is right for them
Robust inventory of critical components
• Provides fast turn around time minimizing tool downtime
24 hour burn-in test cycle on dedicated test station
• Affirms functionality and repeatability of assembly upon delivery
12-month warranty (Original Manufacturer’s Warranty is 90 days)
• Guaranteed product performance with Certificate of Compliance
90v to 70v Motor Upgrades Available
• Higher torque output across operating range
• Cooler operating temperature for longer service life |
Available Services:
• ReNEW
• Exchange
• New
Applicable Systems/Platforms
• Aspen II Diode
• Aspen II Triode
• Aspen II ICP, ICPsm, and Light Etch
• Aspen II CVD
Alleviates Typical Performance Degradation/Failure Modes:
• Pin search errors
• Rotation errors
• Extension time out errors
• Dropped or misplaced wafers
• Unable to find home position
• Excessive noise
• High mechanical particle counts
Features & Benefits
New consumables and replaced components
• Extended life
• Improved product performance
Customizable service programs
• Offers customers the flexibility to choose which program is right for them
Robust inventory of critical components
• Provides fast turn around time minimizing tool downtime
24 hour burn-in test cycle on dedicated test station
• Affirms functionality and repeatability of assembly upon delivery
12-month warranty (Original Manufacturer’s Warranty is 90 days)
• Guaranteed product performance with Certificate of Compliance
Robot
Assembled Utilizing Dedicated Fixture Tooling
• Verifies Robot is 100% Accurately Functional
• After Assembly, robot is cyclically tested, ensuring:
• Burn-in of Geneva gear set
• Smooth and reliable operation
• Perfect Rotational Alignment in “Home Position” |
