P5000TM
The most flexible CVD and etch system for manufacturing
complex devices in high-volume production
● We have entered a global licensing agreement with Applied Materials that
allows OEM Group to manufacture, refurbish and upgrade P5000 systems.
● We’ve done this before! Our (September 2012) P5000 agreement bolsters
the synergies of OEM Group’s 2008 and 2011 business-unit acquisitions
from AMAT; and it aligns with the collaboration we do with the
AMAT/ Varian ion implant team.
The license covers the technology transfer of P5000 CVD, Etch and Orienter chambers, including:
- Engineering IP and process knowledge
- Software code and all revisions, and licensing rights
- Training materials
- Manuals
● Our dedicated P5000 team offers:
- System reconfiguration
- Chamber additions
- Deinstallation/Installation
- Process conversion
- Heater and susceptor refurbishment
- Chamber additions and upgrades
- Wafer size conversions
- Professional on-site service
- System repurposing
- Complete installations, start-up and process support including full warranty
- Global sustaining support and parts inventory
● Expertise In:
- DxZ Nitride and TEOS chambers
- WxZ chambers
- HeWeB chambers
- MxP, MxP+ and eMxP+ chambers
- CVD chambers
- SACVD chambers
- Etch chambers
