P5000TM

The most flexible CVD and etch system for manufacturing
complex devices in high-volume production

We have entered a global licensing agreement with Applied Materials that
   allows OEM Group to manufacture, refurbish and upgrade P5000 systems.

We’ve done this before! Our (September 2012) P5000 agreement bolsters
    the synergies of OEM Group’s 2008 and 2011 business-unit acquisitions
    from AMAT; and it aligns with the collaboration we do with the
    AMAT/ Varian ion implant team.

The license covers the technology transfer of P5000 CVD, Etch and Orienter chambers, including:

  • Engineering IP and process knowledge
  • Software code and all revisions, and licensing rights
  • Training materials
  • Manuals

Our dedicated P5000 team offers:

  • System reconfiguration
  • Chamber additions
  • Deinstallation/Installation
  • Process conversion
  • Heater and susceptor refurbishment
  • Chamber additions and upgrades
  • Wafer size conversions
  • Professional on-site service
  • System repurposing
  • Complete installations, start-up and process support including full warranty
  • Global sustaining support and parts inventory

Expertise In:

  • DxZ Nitride and TEOS chambers
  • WxZ chambers
  • HeWeB chambers
  • MxP, MxP+ and eMxP+ chambers
  • CVD chambers
  • SACVD chambers
  • Etch chambers