Novellus® Concept One & Concept Two

OEM Group offers a remanufacturing solution to provide customers with a Novellus CVD system that has been custom built to “like new” condition complete with new state-of-the-art components, a warranty that is the same as the Original Equipment Manufacturer, and upgrades designed to greatly improve system performance.

With the capability of processing up to seven wafers simultaneously and the multi-station continuous processing capabilities, Novellus Concept One and Novellus Concept Two address these performance parameters:
• Yield and film quality
• High throughput
• Process repeatability

Novellus Concept One   Novellus Concept Two
 

Expertise in the following:
• Dielectric CVD
• TEOS
• Tungsten CVD

 

Expertise in the following:
• Sequel Dielectric
• SPEED Gap Fill
• Altus Tungsten