MRC Eclipse Star, Mark II & Mark IV Introduction
The MRC Eclipse Star, Mark II, and Mark IV physical vapor deposition (PVD) system is manufactured exclusively by OEM Group. Utilizing state-of-the-art manufacturing facilities, OEM Group offers both new and refurbished systems, retrofits, upgrades, OEM-direct spare parts, and field service.
MRC Eclipse Systems:
• 100mm to 200mm wafer size capability
• Front or backside metallization
• High throughput
• Low particle vertical sputtering
• 4 vacuum Isolated process chambers
• Superior process control
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