MRC™ Eclipse PVD Systems


MRC Eclipse Star, Mark II and Mark IV physical vapor deposition (PVD) systems are manufactured exclusively by OEM Group. Leveraging our state-of-the-art manufacturing facilities, we offer both new and remanufactured systems, retrofits, upgrades, OEM-direct spare parts and field service.

MRC Eclipse Systems Include:

  • 100mm to 200mm wafer size capability
  • Front or backside metallization
  • High throughput
  • Low particle vertical sputtering
MRC Star & Mark II PVD   MRC Mark IV PVD