MRC Eclipse Star and Mark II PVD

MRC Eclipse

MRC Eclipse Star and Mark II PVD Introduction

MRC Mark II physical vapor deposition (PVD) system is manufactured exclusively by OEM Group. Utilizing state-of-the-art manufacturing facilities, service and support are worldwide: Asia, China, Europe, Israel and the U.S. OEM Group is the exclusive OEM-licensed manufacturer of the MRC Eclipse Mark II. New and remanufactured systems are available.

Applications:

  • Contact layers – silicides
  • Interconnects
  • Barriers
  • Packaging (bump and backside)
  • GaAs and compound substrates
  • Discretes
  • Resistors (inkjet and optoelectronics)
  • Conductors (inkjet and optoelectronics)

Features & Benefits:

  • High throughput
  • High uptime
  • Low particle vertical sputtering
  • Vacuum isolated process chambers
  • Reactive sputtering
  • Large process portfolio
  • Superior process control
  • Small footprint
  • Exceptional reliability
  • Front or backside metallization on wafers up to 200mm
  • Low cost of ownership
  • Wafers up to 200mm diameter
  • SEMI S2-93A and CE compliance

MRC Eclipse Star and Mark II

MRC Eclipse Star, Mark II, and Mark IV Upgrades

Mark II Controller Upgrade

Mark IV Controller Upgrade