MRC Eclipse Mark IV PVD

MRC Eclipse

MRC Eclipse Mark IV PVD Introduction

MRC Mark IV physical vapor deposition (PVD) system is manufactured exclusively by OEM Group. Our state-of-the-art manufacturing facilities, service and support are worldwide: Asia, Europe, Israel and the United States. OEM Group is the exclusive OEM-licensed manufacturer of the MRC Eclipse Mark II. Ask us about new or remanufactured systems .

MRC Eclipse Mark IV is an ultra-high vacuum (UHV), serially indexed, vertical wafer plane, physical vapor deposition system designed for front and backside metallization of semiconductor wafers. Mark IV is the fourth-generation Eclipse system in a family of advanced, reliable and high productivity PVD systems. The system incorporates process enhancements and product improvements while still utilizing the same proven layout and features of the Eclipse product line.

Applications:

  • Contact layers – silicides
  • Interconnects
  • Barriers
  • Packaging (bump and backside)
  • GaAs and compound substrates
  • Discretes
  • Resistors (inkjet and optoelectronics)
  • Conductors (inkjet and optoelectronics)

Features & Benefits:

  • High throughput
  • High uptime
  • Low particle vertical sputtering
  • Vacuum isolated process chambers
  • Reactive sputtering
  • Large process portfolio
  • Superior process control
  • Small footprint

MRC Eclipse Mark IV

MRC Eclipse Star, Mark II, and Mark IV Upgrades

Mark IV Controller Upgrade

Star and Mark II Controller Upgrade