The Robot & Robot Arm ReNEW Program features a complete assembly overhaul back to original equipment manufacturer specifications, plus rigorous testing utilizing a dedicated Aspen II test platform. Our program provides a reduced cost alternative to traditional full unit replacement, and our rapid turnaround minimizes downtime, reduces inventory carrying costs, and provides lower overall cost of ownership.

Available Services:
• ReNEW
• Exchange
• New

Applicable Systems/Platforms
• Aspen II Diode
• Aspen II Triode
• Aspen II ICP, ICPsm, and Light Etch
• Aspen II CVD

Alleviates Typical Performance Degradation/Failure Modes:
• Pin search errors
• Rotation errors
• Extension time out errors
• Dropped or misplaced wafers
• Unable to find home position
• Excessive noise
• High mechanical particle counts

Features & Benefits
New consumables and replaced components
• Extended life
• Improved product performance
Customizable service programs
• Offers customers the flexibility to choose which program is right for them
Robust inventory of critical components
• Provides fast turn around time minimizing tool downtime
24 hour burn-in test cycle on dedicated test station
• Affirms functionality and repeatability of assembly upon delivery
12-month warranty (Original Manufacturer’s Warranty is 90 days)
• Guaranteed product performance with Certificate of Compliance

Robot Assembled Utilizing Dedicated Fixture Tooling
• Verifies Robot is 100% Accurately Functional
• After Assembly, robot is cyclically tested, ensuring:
• Burn-in of Geneva gear set
• Smooth and reliable operation
• Perfect Rotational Alignment in “Home Position”

Robot Arm Assembled on dedicated OEM designed fixture-tooling
• Ensures the pivotal gear set is correctly matched and marked
• Installed into a secondary fixture, adjusted as necessary
• Subjected to a three pin alignment test
• Verified to be 100% accurately functional

Robot Arm Test Stand Allows For:
• Matching of gears
• Arm assembly in either the “smooth out” or the “nose out” configuration
• Further refinement of gear mesh prior to final assembly