In Stock Mattson Spare Parts
Ref P/N |
OEM Spares PN |
Description |
040-00003-00 |
MAT-0400000300 |
Gear, Linkage Arm |
040-00004-00 |
MAT-0400000400 |
Housing, Bearing |
040-00005-00 |
MAT-0400000500 |
Spacer |
040-00006-00 |
MAT-0400000600 |
Shaft |
040-00007-00 |
MAT-0400000700 |
Shaft |
040-00008-00 |
MAT-0400000800 |
Spacer, 1.15 OD X 1.003ID X .1 THK |
040-00011-00 |
MAT-0400001100 |
Gear, Arm |
040-00012-00 |
MAT-0400001200 |
Bushing |
040-00013-00 |
MAT-0400001300 |
Spacer |
040-00014-00 |
MAT-0400001400 |
Spacer |
040-00015-00 |
MAT-0400001500 |
Cover |
040-00016-00 |
MAT-0400001600 |
Shaft |
040-00017-00 |
MAT-0400001700 |
Housing, Bearing |
040-00018-00 |
MAT-0400001800 |
Spacer, 1.63OD X 1.505ID X .585 T. |
040-00019-00 |
MAT-0400001900 |
Cover |
040-00022-00 |
MAT-0400002200 |
Cover |
040-00023-00 |
MAT-0400002300 |
Spacer, .62OD X .40ID X .063 THK |
040-00024-00 |
MAT-0400002400 |
Housing, Bearing |
040-00025-00 |
MAT-0400002500 |
Shaft |
040-00026-00 |
MAT-0400002600 |
Cover |
040-00027-00 |
MAT-0400002700 |
Shaft |
040-00031-00 |
MAT-0400003100 |
Linkage |
040-00035-00 |
MAT-0400003500 |
Flange |
040-00037-00 |
MAT-0400003700 |
Washer |
040-00038-00 |
MAT-0400003800 |
Cover, Seal |
040-00039-00 |
MAT-0400003900 |
Cover |
040-00051-00 |
MAT-0400005100 |
Ball Screw |
040-00053-00 |
MAT-0400005300 |
Bushing |
040-00054-00 |
MAT-0400005400 |
Bushing |
040-00055-00 |
MAT-0400005500 |
Gear, Geneva, Robot, External Arm |
040-00056-00 |
MAT-0400005600 |
Flag, Extension |
040-00057-00 |
MAT-0400005700 |
Bushing |
040-00058-00 |
MAT-0400005800 |
Flange |
040-00060-00 |
MAT-0400006000 |
Washer |
040-00061-00 |
MAT-0400006100 |
Housing |
040-00062-00 |
MAT-0400006200 |
Cover |
040-00063-00 |
MAT-0400006300 |
Housing, Screw |
040-00065-00 |
MAT-0400006500 |
Gear, Extension/Retraction |
040-00066-00 |
MAT-0400006600 |
Bracket |
040-00068-00 |
MAT-0400006800 |
Spacer, 1.055 ID X .90 OD X .58 Thick |
040-00069-00 |
MAT-0400006900 |
Housing, Bearing |
040-00070-00 |
MAT-0400007000 |
Bracket, Sensor |
040-00071-00 |
MAT-0400007100 |
Shaft |
040-00072-00 |
MAT-0400007200 |
Flag, Extension |
040-00092-00 |
MAT-0400009200 |
Bracket, Extension |
040-00097-00 |
MAT-0400009700 |
Spacer |
041-00048-00 |
MAT-0410004800 |
Clamp, Shuttle Rotation |
041-00049-00 |
MAT-0410004900 |
Clamp, Shuttle Rotation |
053-00020-00 |
MAT-0530002000 |
Housing, Bearing |
062-00002-00 |
CEM-062-00002 |
Standoff,Ceramic |
062-00003-00 |
AEM-062-00003 |
Lift Pin |
062-00005-00 |
CEM-062-00005 |
Bushing,Ceramic |
062-00014-00 |
OEM-062-00014 |
Coupling |
062-00015-00 |
OEM-062-00015 |
Screw |
062-00016-00 |
AEM-062-00016 |
Flag |
062-00021-00 |
AEM-062-00021 |
Pusher, Heater Element |
062-00023-00 |
AEM-062-00023 |
Ground Strap |
139-00000-00 |
OEM-139-00000R |
Robot Arm Assembly Refurbish - no exchange |
139-00000-00 |
OEM-139-00000E |
Robot Arm Assembly Exchange for Refurb |
139-00000-00 |
OEM-139-00000 |
Robot Arm Assembly, NEW |
139-00002-00 |
MAT-1390000200 |
Linkage, Forearm |
139-00003-00 |
MAT-1390000300 |
Cover |
139-00004-00 |
MAT-1390000400 |
Forearm |
139-00005-00 |
MAT-1390000500 |
Arm |
139-00006-00 |
MAT-1390000600 |
Linkage, Arm |
139-00008-00 |
MAT-1390000800 |
Housing, Gear |
139-00009-00 |
MAT-1390000900 |
Paddle Block |
139-00010-00 |
MAT-1390001000 |
Housing |
139-00011-00 |
MAT-1390001100 |
Cover |
139-00012-00 |
MAT-1390001200 |
Cover |
139-00014-00 |
MAT-1390001400 |
Washer, Tear Drop |
140-00001-00 |
MAT-1400000100 |
Flange |
140-00003-00 |
MAT-1400000300 |
Flag |
140-00008-00 |
MAT-1400000800 |
Base |
140-00009-00 |
MAT-1400000900 |
Bracket |
140-00010-00 |
MAT-1400001000 |
Spacer |
140-00011-00 |
MAT-1400001100 |
Gear, Rotation |
140-00012-00 |
MAT-1400001200 |
Bracket |
140-00013-00 |
MAT-1400001300 |
Shaft |
140-00015-00 |
MAT-1400001500 |
Spacer |
140-00016-00 |
MAT-1400001600 |
Housing |
140-00017-00 |
MAT-1400001700 |
Shaft |
140-00018-00 |
MAT-1400001800 |
Cover |
140-00022-00 |
MAT-1400002200 |
Cover |
140-00023-00 |
MAT-1400002300 |
Bracket, Sensor |
140-00024-00 |
MAT-1400002400 |
Flag, Lift |
140-00025-00 |
MAT-1400002500 |
Backet, Sensor |
140-00027-00 |
MAT-1400002700 |
Bumper |
140-00032-00 |
MAT-1400003200 |
Flange, Robot Brake |
140-00033-00 |
MAT-1400003300 |
Bracket, Robot Brake |
144-00005-00 |
AEM-144-00005 |
Filter Enclosure |
144-00007-00 |
AEM-144-00007 |
Washer,Process Chamber |
144-00008-00 |
AEM-144-00008 |
Bracket,Upper Chamber |
144-00009-00 |
AEM-144-00009 |
Bracket,Lower Chamber |
144-00010-00 |
AEM-144-00010 |
Chamber,Strip Process |
144-01000-00 |
MAT-144-01000 |
Feedthrough |
157-00000-00 |
AEM-157-00000 |
Hinge Assembly |
162-00002-00 |
AEM-162-00002 |
Plate,Pin |
162-00005-00 |
AEM-162-00005 |
Support,Heater |
165-91000-00 |
MAT-1659100000 |
CARD ASSY, SECS II |
180-00001-00 |
MAT-1800000100 |
Bracket, Stepper Driver |
180-21000-00 |
MAT-1802100000 |
Cable Asy, #99 Robot INTF to DVR Power |
180-22000-00 |
MAT-1802200000 |
Cable, Asy, #521, RBT INTRFC to EXT MTR |
180-30000-00 |
MAT-1803000000 |
Cable, Asy #200, Robot Interface Driver |
199-01001-00 |
AEM-199-01001 |
Plate,Adapter,Chamber to Loadlock |
255-00568-00 |
MAT-2550056800 |
PCB, Mobile Flex Rob. Rev.A |
258-13890-00 |
AEM-258-13890 |
Vacuum Flange |
263-00518-00 |
MAT-2630051800 |
Cable Asy, JA-37, Robot Interface |
263-00519-00 |
MAT-2630051900 |
Cable Asy, JA-200, Robot Interface |
263-00520-00 |
MAT-2630052000 |
Cable, Asy, J-900, Robot Interface |
263-00537-00 |
AEM-263-00537 |
Assy,Cool Down Chamber,Hinged |
263-01406-00 |
MAT-2630140600 |
Cable Asy, Retro Phone Cord, 6Cond, 8" Lg,
1" TL |
263-02156-00 |
MAT-2630215600 |
Motor Assembly, DC |
263-02156-01 |
MAT-2630215601 |
Motor Cover for KAG Motor |
263-06591-00 |
OEM-263-06591 |
Cross Bar Assy,Slit Door |
263-08738-00 |
OEM-263-08738 |
Slit Door Assy,New Design |
263-08980-00 |
OEM-263-08980R |
Mattson Robot ReNEW |
263-08980-00 |
OEM-263-08980E |
Mattson Robot Exchange for Refurb |
263-08980-00 |
OEM-263-08980R |
Mattson Robot Rebuilt |
280-23000-01 |
MAT-2802300001 |
Cable, Asy, #371, Robot Lift Home |
280-23000-02 |
MAT-2802300002 |
Cable, Asy, #372, Robot Extend 2 |
280-23000-03 |
MAT-2802300003 |
Cable, Asy, #373, Robot Extend 3 |
280-23000-04 |
MAT-2802300004 |
Cable, Asy, #374, Robot Extend 1 |
280-90000-00 |
MAT-2809000000 |
PCB, Main Robot Interface |
280-91000-00 |
MAT-2809100000 |
PCB, Secondary Robot Interface |
301-06596-00 |
MAT-3010659600 |
Cam, Geneva, Robot, External Arm, Rotation |
301-06597-00 |
MAT-3010659700 |
Driver, Rotation, Geneva |
301-08506-00 |
MAT-3010850600 |
Coil Support |
301-08585-00 |
MAT-3010858500 |
Reservoir, Robot Seal |
301-08586-00 |
MAT-3010858600 |
Bushing, Robot Seal |
301-08587-00 |
MAT-3010858700 |
Housing, Robot Seal |
302-06607-00 |
OEM-302-06607 |
Clip,Bay |
302-08852-00 |
OEM-302-08852 |
Strap |
303-00044-00 |
MAT-3030004400 |
Shaft, Bearing Support, RBT ARM |
303-00972-00 |
MAT-3030097200 |
Shaft, Outer Robot |
303-00973-00 |
MAT-3030097300 |
Shaft, Inner Robot |
303-01171-01 |
MAT-3030117101 |
Bracket Rotation ("A" and "B") |
303-01425-00 |
MAT-3030142500 |
Paddle |
303-01425-00 |
MAT-3030142500T |
Paddle, Teflon Coated |
303-02201-00 |
MAT-3030220100 |
Gear, Rotation, Geneva |
303-03552-00 |
AEM-303-03552 |
End Cap w/ Showerhead |
303-03832-00 |
AEM-303-03832 |
Plate, H-Bar, Low Profile |
303-06259-00 |
AEM-303-06259 |
Heater Block,Circular Groove, Standard |
303-06259-00 |
AEM-303-06259A |
Heater Block, Circular Groove, Upgraded |
303-08253-00 |
MAT-303-08253 |
Heater Strap |
304-01183-00 |
MAT-3040118300 |
Plate, Rubber, Stopper |
304-02193-00 |
QEM-304-02193 |
Window,Process Chamber,Qtz |
305-00816-00 |
MAT-3050081600 |
Coupler, Clamp Hub, Modified |
405-00551-00 |
MAT-4050055100 |
Bearing, Linear, Dual, 16H X 60W X 310mm Long |
405-01164-00 |
MAT-4050116400 |
Bearing, crs rlr, Split otr, w/sls |
456-00345-00 |
MAT-4560034500 |
O-ring, 2.850 ID X .210CS, BUNA-N |
456-08727-02 |
MAT-4560872702 |
Seal, Quad, 1.975ID X .210, Viton |
456-09062-00 |
MAT-4560906200 |
Seal, Housing Mounted Unlubricated |
480-01403-01 |
MAT-4800140301 |
Spacer, 3/8 OD x 194 ID x 1/8 Nylon |
497-04580-03 |
MAT-4970458003 |
Washer, Flat #8, 5/64 THICK |
510-08660-00 |
MAT-5100866000 |
Capacitor,Vacuum 100pF,Comet |
520-04612-00 |
MAT-5200461200 |
Microstepping Drive |
533-04082-00 |
OEO-533-04082 |
Heater Element,750W, .328 Dia. |
533-17226-00 |
MAT-5331722600 |
Heater Element,750W, .328 Dia. |
544-00015-00 |
OEM-544-00015 |
Guide Ring |
544-00025-00 |
AEM-544-00025 |
RF Cage |
544-06000-00 |
OEM-544-06000 |
Strap,Connecting,Variable Capacitor |
551-02933-00 |
MAT-5510293300 |
Motor, Stepper, Flat Shaft |
910-10014-00 |
MAT-9101001400 |
Bearing, 90 X 130 X 16mm |
910-10020-00 |
MAT-9101002000 |
Bearing, Flanged, .250 X .625 X .196 |
910-10021-00 |
MAT-9101002100 |
Bearing .250 X .750 X .218 |
910-10022-00 |
MAT-9101002200 |
Bearing, .393 X 1.0236 X .315 |
910-10024-00 |
MAT-9101002400 |
Bearing, 1.0625 X 1.500 X .281 |
910-10026-00 |
MAT-9101002600 |
Bearing, .625 X 1.0625 X .281 |
910-10027-00 |
MAT-9101002700 |
Bearing, .375 X .875 X .218 |
910-10028-00 |
MAT-9101002800 |
Bearing, 1.000 X .375 X .1875 |
910-10029-00 |
MAT-9101002900 |
Bearing, 1.500 X .875 X .1875 |
910-10030-00 |
MAT-9101003000 |
Bearing, .250 X .625 X .196 |
910-10032-00 |
MAT-9101003200 |
Bearing, .1875 X .500 X .1562 |
910-12001-00 |
AEM-910-12001 |
Bearing, Uniball, 0.250x0.656 |
910-14003-00 |
MAT-9101400300 |
Ball Nut |
911-10005-00 |
MAT-9111000500 |
Gear, 0.625 PD, 6MM Bore |
911-10007-00 |
MAT-9111000700 |
Gear, 0.875 PD, 6MM Bore |
912-12003-00 |
MAT-9121200300 |
Spacer, Shaft, .250 X .375 X .031 |
912-12004-00 |
MAT-9121200400 |
Washer, .172 X .515 X .05 |
912-12004-00 |
MAT-9121200400 |
Washer, .172 X .515 X .05 |
912-12006-00 |
MAT-9121200600 |
Spacer, .187 X .250 X .063 |
912-12012-00 |
MAT-9121201200 |
Washer, .125 X .187 X .063, SS |
912-14002-00 |
MAT-9121400200 |
Spring Washer, 1.068x1.368x.072 |
912-14003-00 |
MAT-9121400300 |
Washer, CRT SPR .263 X .433 X .047 |
912-14004-00 |
MAT-9121400400 |
Washer, Spring, 1.365 X 1.093 X .093 |
912-14005-00 |
MAT-9121400500 |
Washer, Spring, Special |
912-14006-00 |
MAT-9121400600 |
Washer, Spring, 1.25 X 1.453 X .090 |
912-14007-00 |
MAT-9121400700 |
Washer, Spring, 1.87 X 1.56 X .078 |
912-14008-00 |
MAT-9121400800 |
Washer, Spring, .640 X .866 X .045 |
912-14010-00 |
MAT-9121401000 |
Washer, Spring, .386 X .495 X .050 |
912-14011-00 |
MAT-9121401100 |
Washer, Spring, 1.50 X 1.17 X .078 |
912-15002-00 |
MAT-9121500200 |
Screw, Shoulder |
913-10015-00 |
MAT-9131001500 |
O-Ring, 4.475 ID X .210 Thick, BUNA-N |
913-10066-00 |
OEM-913-10066 |
Paddle O-Ring,Kalrez 8101 |
913-11003-00 |
MAT-9131100300 |
Seal, 1.25 ID X 1.50 OD |
914-11001-00 |
MAT-9141100100 |
Throttle Valve |
916-11001-00 |
MAT-9161100100 |
Thermocouple |
916-11002-00 |
MAT-9161100200 |
Ceramic, Thermocouple Protect |
930-10022-00 |
MAT-9301002200 |
RES, 15k OHM, 1/4 W, 5% |
930-11027-00 |
OEM-930-11027 |
Vacuum Capacitor |
933-17001-00 |
MAT-9331700100 |
Brake, Robot |
M04-00006-00 |
M04-00006-00 |
Cable Asy, Rotation & Extension J3 |
M22-00001-00 |
M22-00001-00 |
Cable, Compumotor |
N/A |
MAT-9161100100A |
Thermocouple, Upgrade |
N/A |
AEO-10001-00 |
Lift Pin Cylinder Extender |
N/A |
M11-00001-00 |
Matching Network, KTS Fastmatch |
N/A |
AMU10D-2REP |
ReNEW Service, Trazar Match, Model AMU10D-2 |
