Lam Rainbow and Alliance Etch Equipment

OEM Group offers a remanufacturing solution to provide customers with a Lam Rainbow, TCP 9600, and Alliance system that has been custom built to “like new” condition complete with new state-of-the-art components, a warranty that is the same as the Original Equipment Manufacturer, and upgrades designed to improve system performance.

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• Rainbow
• Alliance

Rainbow
– 4400 Polysilicon Etch
– 4500 Oxide Etch
– 4600 Metal Etch
– 4700 Tungsten Etch
– Parallel plate etchers
– Developed for 0.5 – 0.35 process applications
– Mechanical or ESC clamping

TCP 9600
– Wafer size capability from 100 to 200mm
– Extended Rainbow standalone platform
– 1000L turbo pump
– Top and bottom RF power
– Moveable gap
– Top mechanical clamp
– Fixed DSQ stripper
– Developed for sub 0.35 process applications

Alliance
– Cluster platform
– Designed to accept a broad range of Lam process chambers
– Modular design of process chambers
– Fully automated, serial or parallel processing
– Vacuum cassette elevators (VCE)

Click for Product Details:
• Rainbow
• Alliance