Global Service and Technical Support


OEM Group supports an international installed base of more than 35,000 systems.
And from within our LEGENDS and Classics product lines we offer and service:

  • Chemical Process Technology/Surface Preparation: AMAT/Semitool (Batch systems and Cintillio™ SAT, SOT and SST)
  • CVD, PVD, Etch, RTP, Epi: Applied Materials (P5000)
  • Etch: Lam Research (Auto Etch), Tegal (900, 6500)
  • Ion Implant: Varian (most platforms)
  • PVD: MRC (Star, Mark II / IV), SFI (Endeavor™), AMS™
  • RTP: AG Associates (8100/8800)

    – On site or on call
    – After hours
    – Labor only
    – Labor and parts
    – Compressed or standard work weeks

      – Process engineering services
    – Product-specific upgrade kits
    – Preventive maintenance
    – Service contracts

Support Team


  • 42 multi-product Customer Service engineers worldwide provide local, on-site field support
  • Service levels vary by region and are based on customer requirements
  • End-to-end product lifecycle management




  • Globally managed Supply Chain / Local Customer Service representatives
  • Multiple global stocking locations
  • Bonded warehousing in Asia (Taiwan and SEA)
  • Service levels vary by region and customer requirements


Global Technical Escalation


  • Engagement at the 24-hour threshold
  • Global Technical Support provides 2nd level support
  • Product Engineering provides 3rd level support


Global Technical Training


  • Instruction offered at training centers, or on site, by qualified system experts


Service and Support Contacts:


Additional Service and Support contacts in Contact section.