Cintillio™ Wet-chemical Processing Systems
Break New Technological Ground


Within our LEGENDS portfolio, and as part of our Chemical Process Technology™ group, we now offer Cintillio™ Spray Ozone Tool, Spray Acid Tool and Spray Solvent Tool, as well as Scepter, Spin-Rinse Dryer and Storm. This expansion of our product line is the result of OEM Group’s May 2011 purchase of Rhetech and Semitool Austria GmbH manual batch tool sales and service operations from Applied Materials.

Capable of meeting any wet application demand; CAD-designed Cintillio™ products break new technological ground in 25/50 wafer batch process. OEM Group’s versatile wet-chemical processing Cintillio family was conceptualized with end users in mind. Spray Acid Tool (SAT), Spray Solvent Tool (SST) and Spray Ozone Tool (SOT) feature convenient side access, which makes routine maintenance checks both safe and user friendly. And Cintillio’s innovative and proprietary Enhanced Spray Technology™ — featuring up to six rows of nozzles — ensures high throughput and reliable wafer surface wetting with chemical mixtures.

Cintillio can be configured with up to four onboard chemical tanks, external support of chemical delivery units (CDUs), external O3 generators for Ozone processes and 25- or 50-wafer process loads.

Cintillio processes multiple wafer sizes with a single carrier change.
And with the smallest footprint among similar equipment, Cintillio products not only save fab floor space, they also enable high up-time and low cost of ownership.

Cintillio™ SAT Batch
Spray Acid Technology
Cintillio™ SST Batch
Spray Solvent Tool
Cintillio™ SOT Batch
Spray Ozone Tool