The AutoEtch product line includes the 490, 590, 690, and 790 series for etching polysilicon, oxide, aluminum, and tungsten film, respectively.

Continued improvements in both reliability and performance have enabled OEM Group to offer the AutoEtch platform as a ideal product for applications involving line widths of 0.8 micron or greater and wafer sizes of six inches or smaller.

OEM Group Remanufacturing Capabilities Include:
• Remanufactured Lam AutoEtch Etch Systems
• Chamber Retrofits and Upgrades
• Wafer Size Conversions
• Professional Onsite Service
• System Repurposing
• Complete Installations, Startup, and Process Support Including Full Warranty