AMS SMT™ Wafer Size: 100mm – 200mm
The AMS SMT™ is the standard of excellence for reactive sputtering R&D into the unique critical deposition needs of BAW (FBAR and SMR) devices.
• Unique design for repeatable and consistent reactive deposition
• Cassette-to-cassette 10 wafer handling
• Standard AMS AlN (or Mo) process module
• Optional laser interferometer
AMS SMT™ and AMS MMT™ are trademarks of OEM Group, Inc.