Proven Technology for a New World

By acquiring “best-in-class” technologies and offering them globally from a centralized source, OEM Group serves both traditional semiconductor fabs, as well as emerging markets. Fully-integrated solutions, world-class service, and applications development––from one cost-effective partner.

We’re a global innovator in 75mm - 200mm equipment and services to the LED, MEMS, wireless, power, energy harvesting, WLP, data storage, and logic markets. Our LEGENDS™ family of products includes the Tegal 900ACS™-Series and 6500™-Series (thin-film etch), Sputtered Films Endeavor™ (PVD), AMS™ (PVD), MRC Eclipse (PVD), AG Heatpulse® (RTP), Varian Sunset (implant), and Lam AutoEtch™ product lines. And within LEGENDS, and as part of our new Chemical Process Technology™ group, we now offer Cintillio™, Scepter, Sirius, Spin-Rinse Dryer, Spray Acid Tool, Spray Solvent Tool and Storm as the result of our May 2011 purchase of Rhetech and Semitool Austria GmbH manual batch tool sales and service operations from Applied Materials.